Authors

Heyns, Marc; Cornelissen, Ingrid; Mertens, Paul; Mertens, S.; Meuris, Marc; Rotondaro, Antonio; Schaekers, Marc; Teerlinck, Ivo; Vos, Rita; Wolke, K.

Conference

Technical Symposium SEMICON Europa: Environmentally Conscious Manufacturing - Can Environmental Action Also Save Money?

Title

New technologies for reducing chemical costs and environmental impact

Publication type

Proceedings paper

Embargo date

9999-12-31