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New technologies for reducing chemical costs and environmental impact

dc.contributor.authorHeyns, Marc
dc.contributor.authorCornelissen, Ingrid
dc.contributor.authorMertens, Paul
dc.contributor.authorMertens, S.
dc.contributor.authorMeuris, Marc
dc.contributor.authorRotondaro, Antonio
dc.contributor.authorSchaekers, Marc
dc.contributor.authorTeerlinck, Ivo
dc.contributor.authorVos, Rita
dc.contributor.authorWolke, K.
dc.date.accessioned2021-09-30T12:12:15Z
dc.date.available2021-09-30T12:12:15Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2635
dc.sourceIIOimport
dc.titleNew technologies for reducing chemical costs and environmental impact
dc.typeProceedings paper
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorCornelissen, Ingrid
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorVos, Rita
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceTechnical Symposium SEMICON Europa: Environmentally Conscious Manufacturing - Can Environmental Action Also Save Money?
dc.source.conferencedate1/04/1998
dc.source.conferencelocationGeneva Switzerland
imec.availabilityPublished - open access


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