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(Non-hemispherical) apex shape formation and (non-uniform) apex temperature distribution during laser-assisted atomprobe tomography of semiconductors

dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorKumar, Arul
dc.contributor.authorMelkonyan, Davit
dc.contributor.authorArnoldi, Laurent
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorMorris, Richard
dc.contributor.authorVella, Angela
dc.contributor.authorGilbert, Matthieu
dc.contributor.authorJonathan, Houard
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-23T10:08:45Z
dc.date.available2021-10-23T10:08:45Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26362
dc.sourceIIOimport
dc.title(Non-hemispherical) apex shape formation and (non-uniform) apex temperature distribution during laser-assisted atomprobe tomography of semiconductors
dc.typeProceedings paper
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorMorris, Richard
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecMorris, Richard::0000-0002-0902-7088
dc.source.peerreviewno
dc.source.conferenceAtom Probe Tomography & Microscopy
dc.source.conferencedate12/06/2016
dc.source.conferencelocationGyeongju South Korea
imec.availabilityPublished - imec


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