Passivation of poly-Si channel vertical NAND devices du high pressure annealing

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Authors
Breuil, Laurent; lisoni, Judit, G.; Delhougne, Romain; Tan, Chi Lim; Van Houdt, Jan; Van den Bosch, Geert; Furnemont, Arnaud
Conference
International Memory Workshop - IMW
Title
Passivation of poly-Si channel vertical NAND devices du high pressure annealing
Publication type
Proceedings paper
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