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Direct three-dimensional observation of the conduction in poly-Si and In1-xGaxAs 3D NAND vertical channels

dc.contributor.authorCelano, Umberto
dc.contributor.authorCapogreco, Elena
dc.contributor.authorLisoni, Judit
dc.contributor.authorArreghini, Antonio
dc.contributor.authorKunert, Bernardette
dc.contributor.authorGuo, Weiming
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorVan Houdt, Jan
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorFurnemont, Arnaud
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-23T10:12:56Z
dc.date.available2021-10-23T10:12:56Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26404
dc.sourceIIOimport
dc.titleDirect three-dimensional observation of the conduction in poly-Si and In1-xGaxAs 3D NAND vertical channels
dc.typeProceedings paper
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorCapogreco, Elena
dc.contributor.imecauthorArreghini, Antonio
dc.contributor.imecauthorKunert, Bernardette
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorFurnemont, Arnaud
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.contributor.orcidimecArreghini, Antonio::0000-0002-7493-9681
dc.contributor.orcidimecKunert, Bernardette::0000-0002-8986-4109
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.contributor.orcidimecFurnemont, Arnaud::0000-0002-6378-1030
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage192
dc.source.endpage193
dc.source.conferenceIEEE Symposium on VLSI Technology
dc.source.conferencedate14/06/2016
dc.source.conferencelocationHonolulu, HI USA
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=7573430
imec.availabilityPublished - open access


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