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CVD based selective Co deposition on Cu and W for via pre-fill

dc.contributor.authorChen, Phil
dc.contributor.authorZheng, Jun-Fei
dc.contributor.authorLieten, Ruben
dc.contributor.authorFrye, Asa
dc.contributor.authorBaum, Thomas
dc.contributor.authorO'Neill, James
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorMurdoch, Gayle
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.contributor.authorXu, Jeff
dc.contributor.authorZhu, John
dc.contributor.authorBao, Jerry
dc.contributor.authorBadaroglu, Mustafa
dc.contributor.authorYeap, Geoffrey
dc.date.accessioned2021-10-23T10:16:16Z
dc.date.available2021-10-23T10:16:16Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26432
dc.sourceIIOimport
dc.titleCVD based selective Co deposition on Cu and W for via pre-fill
dc.typeMeeting abstract
dc.contributor.imecauthorLieten, Ruben
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorMurdoch, Gayle
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorBadaroglu, Mustafa
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpagePMT-12
dc.source.conference25th Materials for Advanced Metalization Conference - MAM
dc.source.conferencedate21/03/2016
dc.source.conferencelocationBrussel Belgium
imec.availabilityPublished - open access


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