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Interface passivation of III-V/high-k materials by High Energy X-ray Photoelectron Spectroscopy: A quantitative evaluation

dc.contributor.authorConard, Thierry
dc.contributor.authorSpampinato, Valentina
dc.contributor.authorNyns, Laura
dc.contributor.authorSioncke, Sonja
dc.contributor.authorAblett, James
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-23T10:21:55Z
dc.date.available2021-10-23T10:21:55Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26472
dc.sourceIIOimport
dc.titleInterface passivation of III-V/high-k materials by High Energy X-ray Photoelectron Spectroscopy: A quantitative evaluation
dc.typeMeeting abstract
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.source.peerreviewyes
dc.source.conferenceHi-SPEAR Satellite Workshop: Synchrotron SOLEIL
dc.source.conferencedate19/01/2016
dc.source.conferencelocationSaint Aubin France
dc.identifier.urlhttp://www.synchrotron-soleil.fr/portal/page/portal/Soleil/ToutesActualites/Workshops/2016/HI-SPEAR/Program
imec.availabilityPublished - imec


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