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Advanced etching for nanodevices and 2D materials

dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorCooke, Mike
dc.contributor.authorGoodyear, Andy
dc.contributor.authorBraithwaite, Nicolas
dc.contributor.authorSutton, Yvonne
dc.contributor.authorBowden, Mark
dc.contributor.authorAltamirano Sanchez, Efrain
dc.contributor.authorZotovich, Alexey
dc.contributor.authorEl Otell, Ziad
dc.contributor.authorChan, BT
dc.contributor.authorKnoll, Armin
dc.contributor.authorRawlings, Colin
dc.contributor.authorDuerig, Urs
dc.contributor.authorSpiesser, Martin
dc.contributor.authorKaestner, Marcus
dc.contributor.authorNeuber, Christian
dc.contributor.authorRangelow, Ivo
dc.date.accessioned2021-10-23T10:26:09Z
dc.date.available2021-10-23T10:26:09Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26499
dc.sourceIIOimport
dc.titleAdvanced etching for nanodevices and 2D materials
dc.typeMeeting abstract
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.imecauthorEl Otell, Ziad
dc.contributor.imecauthorChan, BT
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.source.peerreviewyes
dc.source.conferenceSNM special session at MNE Conference
dc.source.conferencedate19/09/2016
dc.source.conferencelocationVienna Austria
dc.identifier.urlwww.mne2016.org
imec.availabilityPublished - imec


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