Authors

De Preter, Inge; Derakhshandeh, Jaber; Rebibis, Kenneth June; Miller, Andy; Beyer, Gerald; Beyne, Eric

Conference

Materials for Advanced Metallization Conference - MAM

Title

Study morphology and growth rate of intermetallic compound (IMC) for 3D stacking of fine pitch microbumps

Publication type

Meeting abstract

Embargo date

9999-12-31