Atomic layer processing of 2D materials for beyond CMOS applications

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Authors
Delabie, Annelies; Caymax, Matty; Groven, Benjamin; Heyne, Markus; Zhang, Haodong; Chiappe, Daniele; Heyns, Marc; Radu, Iuliana
Conference
International Conference on Atomic Layer Deposition - ALD
Title
Atomic layer processing of 2D materials for beyond CMOS applications
Publication type
Meeting abstract
Embargo date
9999-12-31
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