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Template assisted synthesis of porous metal oxide and metal nanostructures by ALD

dc.contributor.authorDeng, Sharon
dc.contributor.authorKurttepeli, Murt
dc.contributor.authorBals, Sara
dc.contributor.authorCott, Daire
dc.contributor.authorDetavernier, Christophe
dc.date.accessioned2021-10-23T10:31:59Z
dc.date.available2021-10-23T10:31:59Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26533
dc.sourceIIOimport
dc.titleTemplate assisted synthesis of porous metal oxide and metal nanostructures by ALD
dc.typeMeeting abstract
dc.contributor.imecauthorCott, Daire
dc.source.peerreviewyes
dc.source.beginpage1862
dc.source.conference230th ECS Fall Meeting: Pacific Rim Meeting - PRiME
dc.source.conferencedate2/10/2016
dc.source.conferencelocationHonolulu, HI USA
dc.identifier.urlhttp://ma.ecsdl.org/content/MA2016-02/28/1862.abstract
imec.availabilityPublished - imec
imec.internalnotesECS Meeting Abstracts; Vol. MA 2016-02


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