Authors

Duan, N.; Luo, J.; Wang, G.; Liu, J.; Simoen, Eddy; Mao, S.; Radamson, H.; Wang, X.; Li, J.; Wang, W.; Zhao, C.; Ye, T.

ISSN

0018-9383

Issue

11

Journal

IEEE Transactions on Electron Devices

Volume

63

Title

Reduction of NiGe/n- and p-Ge specific contact resistivity by enhanced dopant segregation in the presence of carbon during nickel germanidation

Publication type

Journal article

Embargo date

9999-12-31