Authors

Kenens, Conny; De Gendt, Stefan; Knotter, D. M.; Loewenstein, Lee; Meuris, Marc; Vandervorst, Wilfried; Heyns, Marc

Conference

Proceedings of the 5th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

Title

Efficiency of ozonated DI water in removing organic contamination

Publication type

Proceedings paper

Embargo date

9999-12-31