Authors

Florent, Karine; Popovici, Mihaela Ioana; Lavizzari, Simone; Di Piazza, Luca; Groeseneken, Guido; Van Houdt, Jan

Conference

47th IEEE Semiconductor Interface Specialists Conference

Title

Impact of top and bottom conductive lyers on electrical and material properties of ferroelectric aluminum doped HfO2

Publication type

Meeting abstract