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Impact of top and bottom conductive lyers on electrical and material properties of ferroelectric aluminum doped HfO2

dc.contributor.authorFlorent, Karine
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorLavizzari, Simone
dc.contributor.authorDi Piazza, Luca
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorVan Houdt, Jan
dc.date.accessioned2021-10-23T10:51:16Z
dc.date.available2021-10-23T10:51:16Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26626
dc.sourceIIOimport
dc.titleImpact of top and bottom conductive lyers on electrical and material properties of ferroelectric aluminum doped HfO2
dc.typeMeeting abstract
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorDi Piazza, Luca
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecGroeseneken, Guido::0000-0003-3763-2098
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.source.peerreviewyes
dc.source.conference47th IEEE Semiconductor Interface Specialists Conference
dc.source.conferencedate8/12/2016
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - imec


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