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Efficiency of ozonated DI water in removing organic contamination

dc.contributor.authorKenens, Conny
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorKnotter, D. M.
dc.contributor.authorLoewenstein, Lee
dc.contributor.authorMeuris, Marc
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-09-30T12:19:08Z
dc.date.available2021-09-30T12:19:08Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2662
dc.sourceIIOimport
dc.titleEfficiency of ozonated DI water in removing organic contamination
dc.typeProceedings paper
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage247
dc.source.endpage255
dc.source.conferenceProceedings of the 5th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
dc.source.conferencedate31/08/1997
dc.source.conferencelocationParis France
imec.availabilityPublished - open access
imec.internalnotesElectrochemical Society Proceedings; Vol. 97-35


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