Plasma Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2S and H2 plasma

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Authors
Groven, Benjamin; Heyne, Markus; Meersschaut, Johan; Nuytten, Thomas; Bender, Hugo; Richard, Olivier; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; Heyns, Marc; Radu, Iuliana; Caymax, Matty; Delabie, Annelies
Conference
2016 E-MRS Spring Meeting and Exhibit
Title
Plasma Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2S and H2 plasma
Publication type
Meeting abstract
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