Publication:
The formation and removal of residue formed during TiN fluorocarbon plasma etching
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1872 since deposited on 2021-09-30
6last month
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Acq. date: 2026-08-16
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Statistics
Views
1872 since deposited on 2021-09-30
6last month
1last week
Acq. date: 2026-08-16
Citations