Publication:

Design-based metrology: beyond CD/EPE metrics to evaluate printability performance

Date

2016

Proceedings Paper

Simple item page Full metadata Statistics

Files

33750.pdf 1.52 MB

Author(s)

;

Mailfert, Julien

;

Leray, Philippe

;

;

Peng, Hsin-Ying

;

Statistics

1900 since deposited on 2021-10-23

3last month

Acq. date: 2026-05-18