Authors

Hsu, Mark; Pantouvaki, Marianna; Merckling, Clement; Marinelli, Antonio; Van Campenhout, Joris; Absil, Philippe; Van Thourhout, Dries

Conference

Proceedings Symposium IEEE Photonics Society Benelux

Title

Design of thin film stacks for non-destructive electro-optical characterizations by spectroscopic ellipsometry

Publication type

Proceedings paper

Embargo date

9999-12-31