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Design of thin film stacks for non-destructive electro-optical characterizations by spectroscopic ellipsometry

dc.contributor.authorHsu, Mark
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorMerckling, Clement
dc.contributor.authorMarinelli, Antonio
dc.contributor.authorVan Campenhout, Joris
dc.contributor.authorAbsil, Philippe
dc.contributor.authorVan Thourhout, Dries
dc.date.accessioned2021-10-23T11:21:27Z
dc.date.available2021-10-23T11:21:27Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26743
dc.sourceIIOimport
dc.titleDesign of thin film stacks for non-destructive electro-optical characterizations by spectroscopic ellipsometry
dc.typeProceedings paper
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorVan Campenhout, Joris
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecVan Campenhout, Joris::0000-0003-0778-2669
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage65
dc.source.endpage68
dc.source.conferenceProceedings Symposium IEEE Photonics Society Benelux
dc.source.conferencedate17/11/2016
dc.source.conferencelocationGent Belgium
imec.availabilityPublished - open access
imec.internalnotesISBN 978-9-0825-0050-9


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