Publication:
Influence of precursor gas on SiGe epitaxial material quality in terms of structural and electrical defects
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1948 since deposited on 2021-10-23
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Acq. date: 2026-08-01
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Statistics
Views
1948 since deposited on 2021-10-23
1last month
1last week
Acq. date: 2026-08-01
Citations