Publication:
Influence of precursor gas on SiGe epitaxial material quality in terms of structural and electrical defects
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1947 since deposited on 2021-10-23
1last month
Acq. date: 2026-05-31
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Statistics
Views
1947 since deposited on 2021-10-23
1last month
Acq. date: 2026-05-31
Citations