Authors

Ike, Shinichi; Simoen, Eddy; Shimura, Yosuke; Hikavyy, Andriy; Vandervorst, Wilfried; Loo, Roger; Takeuchi, Wakana; Nakatsuka, Osamu; Zaima, Shigeaki

ISSN

0021-4922

Issue

4S

Journal

Japanese Journal of Applied Physics

Volume

55

Title

Influence of precursor gas on SiGe epitaxial material quality in terms of structural and electrical defects

Publication type

Journal article