Authors

Ike, Shinichi; Simoen, Eddy; Shimura, Yosuke; Hikavyy, Andriy; Vandervorst, Wilfried; Loo, Roger; Takeuchi, Wakana; Nakatsuka, Osamu; Zaima, Shigeaki

Conference

9th International Workdhop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to-Core Program Joint Seminar "Atomically

Title

Structural and electrical properties of low temperature CVD-grown SiGe epitaxial layers

Publication type

Meeting abstract