Authors

Jacobs, Kristof J.P.; Khaled, Ahmad; Stucchi, Michele; Wang, Teng; Gonzalez, Mario; Croes, Kristof; De Wolf, Ingrid

Conference

International Symposium for Testing and Failure Analysis - ISTFA

Title

Light-induced capacitance alteration for non-destructive fault isolation in TSV structures for 3-D integration

Publication type

Proceedings paper