Micro-opto-mechanical pressure sensor (MOMPS) in SIN integrated photonics platform

Thumbnail
View/open
Metadata
Show full item record
Authors
Jansen, Roelof; Rochus, Veronique; Goyvaerts, Jeroen; Vandenbosch, Guy; van de Voort, Bob; Neutens, Pieter; O'Callaghan, John; Tilmans, Harrie; Rottenberg, Xavier
Conference
TechConnect World Innovation Conference & Expo
Title
Micro-opto-mechanical pressure sensor (MOMPS) in SIN integrated photonics platform
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections