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Micro-opto-mechanical pressure sensor (MOMPS) in SIN integrated photonics platform

dc.contributor.authorJansen, Roelof
dc.contributor.authorRochus, Veronique
dc.contributor.authorGoyvaerts, Jeroen
dc.contributor.authorVandenbosch, Guy
dc.contributor.authorvan de Voort, Bob
dc.contributor.authorNeutens, Pieter
dc.contributor.authorO'Callaghan, John
dc.contributor.authorTilmans, Harrie
dc.contributor.authorRottenberg, Xavier
dc.date.accessioned2021-10-23T11:32:11Z
dc.date.available2021-10-23T11:32:11Z
dc.date.issued2016-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26780
dc.sourceIIOimport
dc.titleMicro-opto-mechanical pressure sensor (MOMPS) in SIN integrated photonics platform
dc.typeProceedings paper
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorGoyvaerts, Jeroen
dc.contributor.imecauthorvan de Voort, Bob
dc.contributor.imecauthorNeutens, Pieter
dc.contributor.imecauthorO'Callaghan, John
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conferenceTechConnect World Innovation Conference & Expo
dc.source.conferencedate22/05/2016
dc.source.conferencelocationWashington DC USA
dc.identifier.urlhttp://techconnectworld.com/World2016/a.php?i=184
imec.availabilityPublished - open access


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