Quasi 2D epitaxial Si-O superlattices: growth, device performance and defect analysis

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Authors
Jayachandran, Suseendran; Martens, Koen; Simoen, Eddy; Caymax, Matty; Vandervorst, Wilfried; Heyns, Marc; Delabie, Annelies
Conference
MRS Spring Meeting Symposium EP4: Emerging Silicon Science and Technology
Title
Quasi 2D epitaxial Si-O superlattices: growth, device performance and defect analysis
Publication type
Meeting abstract
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