Publication:

CVD-Mn/CVD-Ru-based barrier/liner solution for advanced BEOL Cu/low-k interconnects

Date

2016

Proceedings Paper

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Files

35080.pdf 778.15 KB

Author(s)

Jourdan, Nicolas

;

van der Veen, Marleen

;

Vega Gonzalez, Victor

;

;

Lesniewska, Alicja

;

Varela Pedreira, Olalla

;

Van Elshocht, Sven

;

Boemmels, Juergen

;

Statistics

2021 since deposited on 2021-10-23

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Acq. date: 2026-08-31