Show simple item record

In-line ambient impurity measurement of a rapid thermal process chamber by using atmospheric pressure ionization mass spectrometer

dc.contributor.authorKondoh, Eiichi
dc.contributor.authorVereecke, Guy
dc.contributor.authorHeyns, Marc
dc.contributor.authorMaex, Karen
dc.contributor.authorGutt, T.
dc.contributor.authorNényei, Z.
dc.date.accessioned2021-09-30T12:23:34Z
dc.date.available2021-09-30T12:23:34Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2679
dc.sourceIIOimport
dc.titleIn-line ambient impurity measurement of a rapid thermal process chamber by using atmospheric pressure ionization mass spectrometer
dc.typeProceedings paper
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorMaex, Karen
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage51
dc.source.endpage56
dc.source.conferenceRapid Thermal and Integrated Processing VII
dc.source.conferencedate13/04/1998
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - open access
imec.internalnotesMRS Symposium Proceedings; Vol. 525


Files in this item

Thumbnail
Name:
2341.pdf
Size:
326.2Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record