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Design strategy for the integration of DSA vias in sub-7nm interconnects

dc.contributor.authorKarageorgos, Ioannis
dc.date.accessioned2021-10-23T11:38:24Z
dc.date.available2021-10-23T11:38:24Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26801
dc.sourceIIOimport
dc.titleDesign strategy for the integration of DSA vias in sub-7nm interconnects
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceDSA meeting - Institute of Nanoscience and Nanotechnology - NCSR Demokritos
dc.source.conferencedate8/01/2016
dc.source.conferencelocationAthens Greece
dc.contributor.thesisadvisorRyckaert, Julien
imec.availabilityPublished - imec


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