Publication:
Integration of Directed Self-Assembly (DSA) via patterning in sub-7nm interconnects - A designer's perspective
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1878 since deposited on 2021-10-23
1last month
Acq. date: 2025-12-14
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1878 since deposited on 2021-10-23
1last month
Acq. date: 2025-12-14
Citations