dc.contributor.author | Karageorgos, Ioannis | |
dc.contributor.author | Ryckaert, Julien | |
dc.contributor.author | Gronheid, Roel | |
dc.contributor.author | Tung, Maryann C. | |
dc.contributor.author | Wong, H.-S. Philip | |
dc.contributor.author | Karageorgos, Evangelos | |
dc.contributor.author | Bekaert, Joost | |
dc.contributor.author | Vandenberghe, Geert | |
dc.contributor.author | Dehaene, Wim | |
dc.date.accessioned | 2021-10-23T11:39:52Z | |
dc.date.available | 2021-10-23T11:39:52Z | |
dc.date.issued | 2016-10 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/26806 | |
dc.source | IIOimport | |
dc.title | Templated DSA vias in sub-7 nm circuits: Design strategy and DSA-aware via decomposition | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Ryckaert, Julien | |
dc.contributor.imecauthor | Gronheid, Roel | |
dc.contributor.imecauthor | Bekaert, Joost | |
dc.contributor.imecauthor | Vandenberghe, Geert | |
dc.contributor.imecauthor | Dehaene, Wim | |
dc.contributor.orcidimec | Bekaert, Joost::0000-0003-3075-3479 | |
dc.source.peerreview | no | |
dc.source.conference | International Symposium on DSA | |
dc.source.conferencedate | 11/10/2016 | |
dc.source.conferencelocation | Grenoble France | |
imec.availability | Published - imec | |