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Impact of Mn-based barriers on dielectric breakdown voltage and capacitance

dc.contributor.authorLesniewska, Alicja
dc.contributor.authorWu, Chen
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorBriggs, Basoene
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.contributor.authorCroes, Kristof
dc.date.accessioned2021-10-23T12:07:53Z
dc.date.available2021-10-23T12:07:53Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26892
dc.sourceIIOimport
dc.titleImpact of Mn-based barriers on dielectric breakdown voltage and capacitance
dc.typeMeeting abstract
dc.contributor.imecauthorLesniewska, Alicja
dc.contributor.imecauthorWu, Chen
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorBriggs, Basoene
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorCroes, Kristof
dc.contributor.orcidimecLesniewska, Alicja::0000-0003-3863-065X
dc.contributor.orcidimecWu, Chen::0000-0002-4636-8842
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage101
dc.source.endpage102
dc.source.conferenceMaterials for Advanced Metallization Conference - MAM
dc.source.conferencedate20/03/2016
dc.source.conferencelocationBrussels Belgium
imec.availabilityPublished - open access
imec.internalnotespaper PCR-06


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