dc.contributor.author | Liang, Hu | |
dc.contributor.author | Posthuma, Niels | |
dc.contributor.author | Eickelkamp, Martin | |
dc.contributor.author | Fahle, Dirk | |
dc.contributor.author | Van Hove, Marleen | |
dc.contributor.author | Zhao, Ming | |
dc.contributor.author | Decoutere, Stefaan | |
dc.contributor.author | Langer, Robert | |
dc.date.accessioned | 2021-10-23T12:13:07Z | |
dc.date.available | 2021-10-23T12:13:07Z | |
dc.date.issued | 2016 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/26908 | |
dc.source | IIOimport | |
dc.title | p-GaN e-mode HEMT power device manufacturing on 200mm substrates using aixtron AIX G5+C MOCVD system | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Liang, Hu | |
dc.contributor.imecauthor | Posthuma, Niels | |
dc.contributor.imecauthor | Zhao, Ming | |
dc.contributor.imecauthor | Decoutere, Stefaan | |
dc.contributor.imecauthor | Langer, Robert | |
dc.contributor.orcidimec | Posthuma, Niels::0000-0002-6029-1909 | |
dc.contributor.orcidimec | Zhao, Ming::0000-0002-0856-851X | |
dc.contributor.orcidimec | Decoutere, Stefaan::0000-0001-6632-6239 | |
dc.contributor.orcidimec | Langer, Robert::0000-0002-1132-3468 | |
dc.source.peerreview | no | |
dc.source.conference | 13th China International Forum on Solid State Lighting - SSLCHINA | |
dc.source.conferencedate | 15/11/2016 | |
dc.source.conferencelocation | Beijing China | |
imec.availability | Published - imec | |