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p-GaN e-mode HEMT power device manufacturing on 200mm substrates using aixtron AIX G5+C MOCVD system
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Authors
Liang, Hu
;
Posthuma, Niels
;
Eickelkamp, Martin
;
Fahle, Dirk
;
Van Hove, Marleen
;
Zhao, Ming
;
Decoutere, Stefaan
;
Langer, Robert
Conference
13th China International Forum on Solid State Lighting - SSLCHINA
Title
p-GaN e-mode HEMT power device manufacturing on 200mm substrates using aixtron AIX G5+C MOCVD system
Publication type
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