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The effect of forming gas annealing on capacitance-voltage hysteresis in the high- $j/In0.53Ga0.47As metal-oxide-semiconductor system
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Authors
Lin, Jun
;
Monaghan, Scott
;
Cherkaoui, Karim
;
Povey, Ian M.
;
Sheehan, Brendan
;
Franco, Jacopo
;
Hurley, Paul K.
Conference
19th Workshop on Dielectrics in Microelectronics - WoDiM
Title
The effect of forming gas annealing on capacitance-voltage hysteresis in the high- $j/In0.53Ga0.47As metal-oxide-semiconductor system
Publication type
Proceedings paper
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