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Modelling, simulation and experiment of both uniform and stepped thickness cMUT cells

dc.contributor.authorMao, Shengping
dc.contributor.authorRochus, Veronique
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorBrondani Torri, Guilherme
dc.contributor.authorTilmans, Harrie
dc.contributor.authorRottenberg, Xavier
dc.date.accessioned2021-10-23T12:30:32Z
dc.date.available2021-10-23T12:30:32Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26957
dc.sourceIIOimport
dc.titleModelling, simulation and experiment of both uniform and stepped thickness cMUT cells
dc.typeOral presentation
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorBrondani Torri, Guilherme
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecBrondani Torri, Guilherme::0000-0002-5450-658X
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.conference15th Conference on Micromachined Ultrasonic Transducers - MUT
dc.source.conferencedate9/06/2016
dc.source.conferencelocationRoma Italy
imec.availabilityPublished - imec


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