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Three-dimensional amorphous TiO2 thin-film electrodes deposited on micro-pillars by spatial atomic layer deposition for Li+-ion batteries

dc.contributor.authorMoitzheim, Sebastien
dc.contributor.authorBalder, Ellis
dc.contributor.authorPoodt, Paul
dc.contributor.authorUnnikrishnan, Sandeep
dc.contributor.authorVereecken, Philippe
dc.date.accessioned2021-10-23T12:57:45Z
dc.date.available2021-10-23T12:57:45Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27030
dc.sourceIIOimport
dc.titleThree-dimensional amorphous TiO2 thin-film electrodes deposited on micro-pillars by spatial atomic layer deposition for Li+-ion batteries
dc.typeProceedings paper
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.source.peerreviewyes
dc.source.beginpageA1-128
dc.source.conference230th ECS Meeting: PRiME
dc.source.conferencedate2/10/2016
dc.source.conferencelocationHonolulu, HI USA
dc.identifier.urlhttps://ecs.confex.com/ecs/230/webprogram/Paper94601.html
imec.availabilityPublished - imec
imec.internalnotesAbstract MA2016-02 128


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