Authors

Murota, Junichi; Loo, Roger; Tillack, Bernd; Le Thanh, Vin; Chiussi, Stefano; Hirayama, Makoto; Niwano, Michio

Conference

JSPS - FZ-Jülich Workshop on "Atomically Controlled Processing for Ultra-large Scale Integration"

Title

EI4GroupIV: Excellence Initiative for New Group IV semiconductor materials & processing

Publication type

Meeting abstract

Embargo date

9999-12-31