Show simple item record

EI4GroupIV: Excellence Initiative for New Group IV semiconductor materials & processing

dc.contributor.authorMurota, Junichi
dc.contributor.authorLoo, Roger
dc.contributor.authorTillack, Bernd
dc.contributor.authorLe Thanh, Vin
dc.contributor.authorChiussi, Stefano
dc.contributor.authorHirayama, Makoto
dc.contributor.authorNiwano, Michio
dc.date.accessioned2021-10-23T13:08:06Z
dc.date.available2021-10-23T13:08:06Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27057
dc.sourceIIOimport
dc.titleEI4GroupIV: Excellence Initiative for New Group IV semiconductor materials & processing
dc.typeMeeting abstract
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage58
dc.source.endpage59
dc.source.conferenceJSPS - FZ-Jülich Workshop on "Atomically Controlled Processing for Ultra-large Scale Integration"
dc.source.conferencedate24/11/2016
dc.source.conferencelocationJülich Germany
imec.availabilityPublished - imec


Files in this item

Thumbnail
Name:
34780.pdf
Size:
465.0Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record