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Anisotropic biaxial stress measurements in finFET channels through nano-focused raman spectroscopy

dc.contributor.authorNuytten, Thomas
dc.contributor.authorJamal, Muhammad Tahir
dc.contributor.authorHantschel, Thomas
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorSchulze, Andreas
dc.contributor.authorFavia, Paola
dc.contributor.authorBender, Hugo
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-23T13:18:29Z
dc.date.available2021-10-23T13:18:29Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27084
dc.sourceIIOimport
dc.titleAnisotropic biaxial stress measurements in finFET channels through nano-focused raman spectroscopy
dc.typeOral presentation
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.conferencePTW 2016H2
dc.source.conferencedate17/10/2016
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec


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