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Precise measurement of thin film thickness in 3D-NAND device with CD-SEM

dc.contributor.authorOhashi, Takeyoshi
dc.contributor.authorAtsuko, Yamaguchi
dc.contributor.authorKobayashi, Takashi
dc.contributor.authorInoue, Osamu
dc.contributor.authorHasumi, Kazuhisa
dc.contributor.authorIkota, Masami
dc.contributor.authorTan, Chi Lim
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorLorusso, Gian
dc.contributor.authorFurnemont, Arnaud
dc.date.accessioned2021-10-23T13:20:25Z
dc.date.available2021-10-23T13:20:25Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27089
dc.sourceIIOimport
dc.titlePrecise measurement of thin film thickness in 3D-NAND device with CD-SEM
dc.typeOral presentation
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorFurnemont, Arnaud
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecFurnemont, Arnaud::0000-0002-6378-1030
dc.source.peerreviewno
dc.source.conference42nd Micro and Nano Engineering Conference
dc.source.conferencedate19/09/2016
dc.source.conferencelocationVienna Austria
imec.availabilityPublished - imec


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