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DSA materials contributions to the defectivity performance of the 14nm half-pitch LiNe flow @ imec

dc.contributor.authorPathangi Sriraman, Hari
dc.contributor.authorVaid, Varun
dc.contributor.authorChan, BT
dc.contributor.authorVandenbroeck, Nadia
dc.contributor.authorLi, Jin
dc.contributor.authorHong, Sung Eun
dc.contributor.authorCao, Yi
dc.contributor.authorDurairaj, Baskaran
dc.contributor.authorLin, Guanyang
dc.contributor.authorSomervell, Mark
dc.contributor.authorKitano, Takahiro
dc.contributor.authorHarukawa, Ryota
dc.contributor.authorSah, Kaushik
dc.contributor.authorCross, Andrew
dc.contributor.authorBayana, Hareen
dc.contributor.authorD'Urzo, Lucia
dc.contributor.authorGronheid, Roel
dc.date.accessioned2021-10-23T13:35:45Z
dc.date.available2021-10-23T13:35:45Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27126
dc.sourceIIOimport
dc.titleDSA materials contributions to the defectivity performance of the 14nm half-pitch LiNe flow @ imec
dc.typeProceedings paper
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorVandenbroeck, Nadia
dc.contributor.imecauthorSah, Kaushik
dc.contributor.imecauthorCross, Andrew
dc.contributor.imecauthorBayana, Hareen
dc.contributor.imecauthorD'Urzo, Lucia
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage97770G
dc.source.conferenceAlternative Lithographic Technologies VIII
dc.source.conferencedate20/02/2016
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2506449
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 9777


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