Authors

Peter, Antony; Witters, Thomas; Dutta, Shibesh; Hikavyy, Andriy; Vaesen, Inge; Van Elshocht, Sven; Schaekers, Marc

ISSN

0167-9317

Journal

Microelectronic Engineering

Volume

149

Title

Phase analysis and thermal stability of thin films synthesized via solid state reaction of Ni with Si1-xGex substrate

Publication type

Journal article