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Plasma-assisted ALD of LiPO(N) for solid state batteries

dc.contributor.authorPut, Brecht
dc.contributor.authorMees, Maarten
dc.contributor.authorHornsveld, Norah
dc.contributor.authorVereecken, Philippe
dc.contributor.authorKessels, Erwin
dc.contributor.authorCreatore, Adriana
dc.date.accessioned2021-10-23T13:54:21Z
dc.date.available2021-10-23T13:54:21Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27172
dc.sourceIIOimport
dc.titlePlasma-assisted ALD of LiPO(N) for solid state batteries
dc.typeMeeting abstract
dc.contributor.imecauthorPut, Brecht
dc.contributor.imecauthorMees, Maarten
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecMees, Maarten::0000-0001-7217-5510
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.source.peerreviewno
dc.source.beginpage347
dc.source.conference230th ECS Meeting: Pacific Rim Meeting Prime - PRiME
dc.source.conferencedate2/10/2016
dc.source.conferencelocationHonolulu, HI USA
dc.identifier.urlhttp://ma.ecsdl.org/content/MA2016-02/3/347.abstract
imec.availabilityPublished - imec
imec.internalnotesECS Meeting Abstracts; Vol. MA2016-02


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