Publication:

Challenges of monolithic integration for SiGe MEMS Technology

Date

2016

Proceedings Paper

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Files

34782.pdf 1.06 MB

Author(s)

Ray Chaudhuri, Ashesh

;

;

Helin, Philippe

;

Francis, Laurent

;

Tilmans, Harrie

Statistics

1900 since deposited on 2021-10-23

Acq. date: 2026-01-26