Show simple item record

Challenges of monolithic integration for SiGe MEMS Technology

dc.contributor.authorRay Chaudhuri, Ashesh
dc.contributor.authorSeveri, Simone
dc.contributor.authorHelin, Philippe
dc.contributor.authorFrancis, Laurent
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-23T14:04:45Z
dc.date.available2021-10-23T14:04:45Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27196
dc.sourceIIOimport
dc.titleChallenges of monolithic integration for SiGe MEMS Technology
dc.typeProceedings paper
dc.contributor.imecauthorRay Chaudhuri, Ashesh
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage3
dc.source.conferenceIEEE SENSORS
dc.source.conferencedate30/10/2016
dc.source.conferencelocationOrlando, FL USA
dc.identifier.urlhttp://ieeexplore.ieee.org/document/7808583/
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
34782.pdf
Size:
1.058Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record