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Gemini-templated PMO low-k films
Publication:
Gemini-templated PMO low-k films
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Date
2016
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Redzheb, Murad
;
Armini, Silvia
;
Okudur, Oguzhan Orkut
;
Vanstreels, Kris
;
Bernstorff, Sigrid
;
Voort, Pascal Van Der
;
Baklanov, Mikhaïl
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1954
since deposited on 2021-10-23
Acq. date: 2025-12-11
Citations
Metrics
Views
1954
since deposited on 2021-10-23
Acq. date: 2025-12-11
Citations