Gemini-templated PMO low-k films

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Authors
Redzheb, Murad; Armini, Silvia; Okudur, Oguzhan Orkut; Vanstreels, Kris; Bernstorff, Sigrid; Voort, Pascal Van Der; Baklanov, Mikhaïl
Conference
Materials for Advanced Metallization
Title
Gemini-templated PMO low-k films
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