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Gemini-templated PMO low-k films

dc.contributor.authorRedzheb, Murad
dc.contributor.authorArmini, Silvia
dc.contributor.authorOkudur, Oguzhan Orkut
dc.contributor.authorVanstreels, Kris
dc.contributor.authorBernstorff, Sigrid
dc.contributor.authorVoort, Pascal Van Der
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-23T14:06:23Z
dc.date.available2021-10-23T14:06:23Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27200
dc.sourceIIOimport
dc.titleGemini-templated PMO low-k films
dc.typeMeeting abstract
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorOkudur, Oguzhan Orkut
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecOkudur, Oguzhan Orkut::0000-0002-4790-7772
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.source.peerreviewno
dc.source.conferenceMaterials for Advanced Metallization
dc.source.conferencedate20/03/2016
dc.source.conferencelocationBrussels Belgium
imec.availabilityPublished - imec


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