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Characterization and barrier properties for Cu metallization of tungsten nitride deposited by PECVD using WF6+N2+H2
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1959 since deposited on 2021-10-01
2last month
Acq. date: 2026-01-09
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Metrics
Views
1959 since deposited on 2021-10-01
2last month
Acq. date: 2026-01-09
Citations